- cvd polysilicon
- поликристаллический кремний, сформированный методом химического осаждения паровой фазы
English-Russian dictionary of microelectronics. 2014.
English-Russian dictionary of microelectronics. 2014.
Chemical vapor deposition — DC plasma (violet) enhances the growth of carbon nanotubes in this laboratory scale PECVD apparatus. Chemical vapor deposition (CVD) is a chemical process used to produce high purity, high performance solid materials. The process is often used in … Wikipedia
LOCOS-Prozess — LOCOS, kurz für englisch Local Oxidation of Silicon (dt. »lokale Oxidation von Silicium«, ist in der Halbleitertechnik ein Verfahren zur elektrischen Isolation von Bauelementen (meist Transistoren). Dafür wird der Silicium Wafer an… … Deutsch Wikipedia
Self-aligned gate — A self aligned gate is a design arrangement where a highly doped gate in a MOSFET is used as a mask for the doping of the source and drain around it. This technique ensures that the gate will always overlap the edges of the source and drain. The… … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Semiconductor device fabrication — Semiconductor manufacturing processes 10 µm 1971 3 µm 1975 1.5 µm 1982 … Wikipedia
Krishna Saraswat — is a professor of electrical engineering at Stanford University in the United States. In May 2002, he was recognised for his work on dielectric science and technology, being awarded the Thomas D. Callinan Award by the Electrochemical Society. In… … Wikipedia
Solar cell — A solar cell made from a monocrystalline silicon wafer … Wikipedia
Nitrogen trifluoride — Nitrogen trifluoride … Wikipedia
Silicon nitride — Preferred IUPAC name Silicon nitride … Wikipedia
Nanocrystalline silicon — Main article: Silicon thin film cell Silicon nanopowder Nanocrystalline silicon (nc Si), sometimes also known as microcrystalline silicon (μc Si), is a form of porous silicon.[1] It is an allotropic form of silicon wi … Wikipedia
Sheet resistance — is a measure of resistance of thin films that are namely uniform in thickness. It is commonly used to characterize materials made by semiconductor doping, metal deposition, resistive paste printing, and glass coating. Examples of these processes… … Wikipedia